METHOD FOR AUTOMATICALLY MEASURING POSITION AND DIMENSION OF MICRO CHANNEL BY USING LASER REFLECTION, MEASUREMENT APPARATUS PERFORMING THE SAME, AND MICRO CHANNEL INSPECTION DEVICE BY USING THE SAME

摘要

PURPOSE: A method for measuring a position and a dimension of a micro channel, an apparatus for performing the same and a micro channel inspection device by using the same are provided to automatically measure the position and the dimension of the micro channel by using laser reflection. CONSTITUTION: A micro chip includes a glass substrate(110), a PDMS substrate(115) and a channel(120) and is fixed to an inspection holder of a micro channel inspection device. A laser assembly(130) is arranged adjacent to the channel(120). The laser assembly(130) has a laser diode(132), a dichroic beam splitter(134), a reflection mirror(136) arranged in parallel to the dichroic beam splitter(134), an objective lens(138) and a photo diode(140). A laser beam radiated from the laser diode(132) is split through the dichroic beam splitter(134) and is reflected from the reflection mirror(136) so that the laser beam passes through the objective lens(138).