APPARATUS FOR FABRICATING SEMICONDUCTOR

摘要

PURPOSE: An apparatus for fabricating a semiconductor is provided to reduce the danger that a coupling member is bent or damaged in setting a susceptor by fixing the coupling member to the upper portion of the susceptor such that the coupling member faces the wall of a chamber. CONSTITUTION: A lower electrode(200) is prepared. A wafer is included in the surface of the susceptor(300) placed on the lower electrode. An upper electrode injects gas toward the upper surface of the wafer, disposed in the upper portion of the susceptor. The coupling member(350) mechanically and electrically couples a chamber cup and the susceptor, disposed in at least three positions of the edge of the susceptor.