| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection device and a defect inspection method using the device capable of reducing a maintenance work, transferring accurately defect information detected in upper processes to lower processes, and recognizing surely the defect in the lower process even when a defect detector installed in the lower process is simplified. SOLUTION: In this defect inspection device and this defect inspection method using the device, a defect detector capable of detecting a plurality of kinds of feature quantities of the defect relative to an inspection material is installed in an upper process line, and a defect detector capable of detecting a part or all of the kinds of the feature quantities is installed in a lower process line, and the feature quantities detected in the upper process lines are transferred as information to the lower process lines. COPYRIGHT: (C)2004,JPO
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