发明名称 Semiconductor device having test element groups
摘要 A plurality of chip regions are defined over a surface of a semiconductor substrate and separated from one another by a scribe region. A plurality of main pads are disposed in the chip regions and a test element group is disposed at the scribe region. The test element group is electrically connected to the main pads through interconnections.
申请公布号 US2004017217(A1) 申请公布日期 2004.01.29
申请号 US20030428130 申请日期 2003.05.02
申请人 RYU JUNG-SU;KIM EUN-HAN 发明人 RYU JUNG-SU;KIM EUN-HAN
分类号 H01L21/66;G01R31/28;(IPC1-7):G01R31/02 主分类号 H01L21/66
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