| 发明名称 |
Control of complex manufacturing processes using continuous process data |
| 摘要 |
Complex process prediction and optimization are performed utilizing an orthogonal transform to represent time-varying continuous signals as discrete values, which are then subjected to a nonlinear regression analysis to relate between the discrete values and process metrics.
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| 申请公布号 |
US2004019470(A1) |
申请公布日期 |
2004.01.29 |
| 申请号 |
US20030621532 |
申请日期 |
2003.07.17 |
| 申请人 |
IBEX PROCESS TECHNOLOGY, INC. |
发明人 |
CARD JILL P.;CHAN WAI T.;CAO AN |
| 分类号 |
G05B13/04;G05B17/02;(IPC1-7):G06F17/10 |
主分类号 |
G05B13/04 |
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