发明名称 Electric optical apparatus and manufacturing of the same, projection display, and electronic instrument
摘要 The invention seeks to provide an electric optical apparatus and a manufacturing method thereof, in which when forming a contact hole by wet etching for controlling an electric potential of a light-shielding layer, etching liquid does not infiltrate the bonding boundary between a supporting substrate and a semiconductor substrate. An electric optical apparatus includes a first insulator layer 206b formed on the underside of a semiconductor layer 1a, a second insulator layer 12 formed on the side lower than the first insulator layer 206b, a light-shielding layer 11a formed between the first insulator layer 206b and the second insulator layer 12, and a contact hole 13 passing through at least the first insulator layer 206b to the light-shielding layer 11a, wherein the light-shielding layer 11a is located at a position upper than that of the bonding boundary between a supporting substrate 10A and a semiconductor substrate. <IMAGE>
申请公布号 EP1288703(A3) 申请公布日期 2004.01.28
申请号 EP20020255887 申请日期 2002.08.23
申请人 SEIKO EPSON CORPORATION 发明人 YASUI, ATSUHITO
分类号 G02F1/13;G02F1/1333;G02F1/1335;G02F1/1362;G02F1/1368;G09F9/30;H01L21/02;H01L21/336;H01L27/12;H01L29/786;H01L51/50 主分类号 G02F1/13
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