| 摘要 |
PURPOSE: A flexible substrate fixing vacuum chuck is provided to be capable of conserving a high levelling degree and securing uniform temperature. CONSTITUTION: A flexible substrate fixing vacuum chuck(1) is provided with a suction plate(10) for loading a process object substrate, an inner vacuum line(11) formed at the inner portion of the suction plate, and an outer vacuum line(13) connected through the inner vacuum line and formed at the edge portion of the suction plate for fixing the process object substrate. Preferably, the outer vacuum line is formed corresponding to the process object substrate. Preferably, the upper surface of the suction plate is polished for conserving a predetermined levelling and vacuum degree. Preferably, the flexible substrate fixing vacuum chuck further includes a support plate made of glass.
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