摘要 |
PROBLEM TO BE SOLVED: To provide a light source device for a microscope capable of irradiating a sample with high-intensity illuminating light. SOLUTION: The light source device is provided with a plurality of laser beam sources 102 to 104, and optical systems for synthesizing the optical paths of a plurality of laser beams emitted from a plurality of laser beam sources 102 to 104. The optical systems are respectively arranged on the optical paths of the laser beams emitted from a plurality of laser beam sources, and include dichroic mirrors 107 to 109 reflecting the respective laser beams toward the same optical path and detectors 110 for detecting the intensity of the laser beam. The detectors 110 are respectively arranged at positions where they receive the laser beams transmitted through the mirrors 107 to 109. Thus, a beam splitter need not be arranged extra in order to detect light. COPYRIGHT: (C)2004,JPO
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