| 摘要 |
PROBLEM TO BE SOLVED: To provide a constant-temperature chiller for manufacturing equipment improving the stability of the temperature control while expanding the limit value of the temperature regulation and reducing the manufacturing cost and the operation cost by simplifying the device whole body. SOLUTION: This constant-temperature chiller 1 for the manufacturing equipment comprises a circulating path 2 supplying the temperature control liquid, a heat exchanger 5, a compressor retaining temperature control liquid for the circulating path at a prescribed temperature via the heat exchanger, and a refrigeration circuit 3 comprising a condenser and a vaporizer. This chiller is formed by disposing a flow rate setting device 14 between the condenser 13 and the vaporizer which comprise the refrigeration circuit 2 and by disposing a branch circuit 16 having a flow regulating valve 15 between the compressor 12 and the vaporizer. An intake pressure regulating valve 17 is disposed between the vaporizer and the compressor 12 comprising the refrigeration circuit so as to regulate the refrigerant to be supplied to the compressor to a prescribed amount, and the flow regulating valve 15 is connected to a temperature controller 11 provided in the circulating path so as to interlockingly regulate the opening/closing of the flow regulating valve 15. COPYRIGHT: (C)2004,JPO
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