| 摘要 |
PROBLEM TO BE SOLVED: To provide a wiring test pattern and an evaluation method therefor capable of easily specifying a short-circuit defective part. SOLUTION: Diffusion resistors 3a to 3d, wiring 6 electrically connecting the diffusion resistors 3a to 3d in series, an adjacent wiring 8 made of the same material as that of the wiring 6 and having a prescribed interval 9 with respect to the wiring 6, and two terminals 7a, 7b electrically connected to the diffusion resistors 3a to 3d are provided on a silicon substrate 1 as the wiring test pattern. The short-circuit part formed between the wiring 6 and the adjacent wiring 8 in the wiring test pattern having this configuration can easily be specified from a change in resistance between the terminals 7a and 7b by applying a prescribed voltage between the terminals 7a and 7b to apply an arbitrary potential to the adjacent wiring 8. COPYRIGHT: (C)2004,JPO
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