METHOD AND DEVICE FOR MANUFACTURING THIN FILM, AND METHOD FOR MANUFACTURING SOLAR CELL AND SOLAR CELL

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for forming a thin film and a manufacturing method of a solar cell, which can obtain a thin film of desired property without influence of material gas and residue in a first thin film formation process on property of a thin film formed in a second thin film formation process, and eliminate the need for providing a plurality of chambers since a plurality of thin films are formed inside the same chamber, thus realizing miniaturization and cost reduction of a device.

SOLUTION: The thin film formation device 1 for forming a plurality of thin films in a substrate 10 in the same chamber 2 by an antenna type plasma CVD method (chemical vapor deposition) has a residue removal means for removing residue which affects property of a second thin film formed next to a first thin film of a plurality of thin films and is caused in a first thin film formation process.

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