| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for generating stable plasma provided with a negative electrode having an excellent field emission characteristic and a long service life so as to enhance plasma density to increase throughput. <P>SOLUTION: This plasma generation device has a plasma chamber surrounded by walls and used for turning a material gas into plasma. The plasma chamber comprises: the negative electrode; a positive electrode; an introduction means of the material gas; and an exhaust means. The device is characterized by forming carbon nanotubes on one surface of the negative electrode, and by installing the positive electrode on that surface side of the negative electrode. <P>COPYRIGHT: (C)2004,JPO |
