| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring the topology (62) of an object (64), using an optical system (60). SOLUTION: This method includes a step of positioning the object in a measuring cell (66), a step of filling cell with fluid, a step which permeates light towards object in the measuring cell, a step of measuring the degree of illumination of object surface, a step which forms an object image, based on the degree of illumination of the surface. Prior to the positioning of the object inside the measuring cell (66), there is included a step of coating the surface (62) of the object (64) to be measured with an optically uniform film. COPYRIGHT: (C)2004,JPO
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