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发明名称
ELECTRON BEAM MICROSCOPE USING ELECTRON BEAM PATTERNS
摘要
申请公布号
IL135115(A)
申请公布日期
2003.12.10
申请号
IL19980135115
申请日期
1998.09.18
申请人
INTEVAC, INC.
发明人
分类号
H01J37/06;H01J37/073;H01J37/244;H01J37/28;(IPC1-7):H01J37/244
主分类号
H01J37/06
代理机构
代理人
主权项
地址
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