| 摘要 |
(a) A method of manufacturing a magnetic head suspension includes a polyimide precursor layer 2 that is formed over a springy material layer 1, (b) a metal layer 3 for lines is formed over the polyimide precursor layer 2, (c) the metal layer 3 is patterned by the subtractive process to produce lines 4, (d) the polyimide precursor layer 2 is patterned by a photolithographic technique to give the configuration corresponding to a polyimide insulating base layer 5, (e) the patterned polyimide precursor layer 2 is imidated to produce the polyimide insulating base layer 5, and (f) a cover coat layer 6 is formed over the lines 4.
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