AQUEOUS CLEANING COMPOSITION CONTAINING COPPER-SPECIFIC CORROSION INHIBITOR FOR CLEANING INORGANIC RESIDUES ON SEMICONDUCTOR SUBSTRATE,申请号KR20037012385-传众专利搜索

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发明名称	AQUEOUS CLEANING COMPOSITION CONTAINING COPPER-SPECIFIC CORROSION INHIBITOR FOR CLEANING INORGANIC RESIDUES ON SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	KR20030093274(A)	申请公布日期	2003.12.06
申请号	KR20037012385	申请日期	2003.09.23
申请人		发明人
分类号	C09K13/08;C11D7/10;C11D7/26;C11D7/32;C11D7/60;G03F7/42;H01L21/02;H01L21/027;H01L21/304;H01L21/306;H01L21/3065;H01L21/311;H01L21/321;H01L21/3213	主分类号	C09K13/08
代理机构		代理人
主权项
地址

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