发明名称 COATED MEMBER AND FABRICATING METHOD THEREOF
摘要 PURPOSE: A coated member is provided to improve surface roughness and reduce damage to a member during a process for forming roughness by forming roughness on the member made of an inorganic ceramic material while using silicon carbide whose hardness is higher than that of the inorganic ceramic material. CONSTITUTION: Roughness(110) is formed on the member(100) composed of the first inorganic ceramic material. A coating layer(120) is coated on the member including the roughness, composed of an oxide compound. The second inorganic ceramic powder with hardness higher than that of the first inorganic ceramic material is injected to the surface of the member to form the roughness.
申请公布号 KR20030092888(A) 申请公布日期 2003.12.06
申请号 KR20020030728 申请日期 2002.05.31
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, TAE WON;PARK, YU CHUN;SIM, GYEONG MAN
分类号 H01L21/00;(IPC1-7):H01L21/00 主分类号 H01L21/00
代理机构 代理人
主权项
地址