发明名称 Method for manufacturing semiconductor image sensor with color filters and bonding pads
摘要 In a method for fabricating a semiconductor device suitable for an image sensor, a bonding pad is formed on a lower insulating layer after the lower insulating layer is formed on a substrate. Then, an upper insulating layer is formed over the substrate to cover the bonding pad. The upper insulating layer is selectively removed to uncover a top portion of the bonding pad. Subsequently, a protection layer is formed over the substrate. After color filter elements are formed on the protection layer, a planar layer is formed to cover the color filter elements. Finally, microlenses are formed on the planar layer.
申请公布号 US6656762(B2) 申请公布日期 2003.12.02
申请号 US20020166618 申请日期 2002.06.12
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 KIM JAEKAP
分类号 G02B5/20;G02B3/00;H01L27/14;H01L27/146;H01L27/148;H04N5/335;H04N5/369;(IPC1-7):H01L21/00 主分类号 G02B5/20
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