Nanolithography molecular beam machine

摘要

A method of directly writing on a surface of a substrate with neutral molecules uses a collimated beam of neutral molecules having a first direction of travel, a laser light energy field having a second direction of travel; and intersects the laser light energy field with the collimated beam of neutral molecules at a grazing angle of incidence between the first direction of travel and the second direction of travel to control the formation of features comprising the neutral molecules on the surface of the substrate.