发明名称 |
Charged particle beam column and method for directing a charged particle beam |
摘要 |
A method and charged particle beam column are presented for directing a primary charged particle beam onto a sample. The primary charged particle beam, propagating along an initial axis of beam propagation towards a focusing assembly, passes through a beam shaper, that affects the cross section of the primary charged particle beam to compensate for aberrations of focusing caused by astigmatism effect of a focusing field produced by an objective lens arrangement of the focusing assembly, and then passes through a beam axis alignment system, that aligns the axis of the primary charged particle beam with respect to the optical axis of the objective lens arrangement.
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申请公布号 |
US2003218133(A1) |
申请公布日期 |
2003.11.27 |
申请号 |
US20020154530 |
申请日期 |
2002.05.22 |
申请人 |
APPLIED MATERIALS ISRAEL LTD |
发明人 |
PETROV IGOR;ROSENBERG ZVIKA |
分类号 |
H01J37/04;H01J37/147;H01J37/153;H01J37/244;H01J37/28;(IPC1-7):H01J37/28 |
主分类号 |
H01J37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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