Sterilizing apparatus and method using the same

摘要

In a sterilizing apparatus, a first electrode (6) is provided in a chamber (1), and a target (T) to be sterilized is supported by the first electrode. The first AC power supply (10) is connected to the first electrode to supply AC power to the first electrode such that a plasma is generated around the first electrode. The DC pulse power supply (5) is connected to the first electrode to supply DC pulse power to the first electrode such that ions or electrons are accelerated toward the target. <IMAGE>