发明名称 Stress tuned blazed grating light valve
摘要 A light modulator includes elongated elements arranged parallel to each other and suspended above a substrate. The light modulator operates in a first diffraction mode and in a second diffraction mode. In the first diffraction mode, an incident light diffracts into a single diffraction order. Each of the elongated elements comprises a central blazed portion, a first outer blaze transition, and a second outer blaze transition. The central blaze portion, couples the first outer blaze transition to the second outer blaze transition. Each of the central blazed portions comprises a reflective surface. Selected ones of the central blazed portions comprise a first conductive element. The first outer blaze transition and the second outer blaze transition are coupled to the substrate.
申请公布号 US6639722(B2) 申请公布日期 2003.10.28
申请号 US20010930820 申请日期 2001.08.15
申请人 SILICON LIGHT MACHINES 发明人 AMM DAVID T.;GUDEMAN CHRISTOPHER;HUNTER JAMES
分类号 B81B3/00;B81C1/00;G02B5/18;G02B26/08;(IPC1-7):G02B5/18;G02B26/00 主分类号 B81B3/00
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