| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow control valve reduced in size and improved in reliability. SOLUTION: This flow control valve 10 has a cylindrical equipment body 11 provided with a needle valve 14 inside thereof and closed by a valve seat 12 in a front surface thereof and closed by a rear cover 13 in a rear surface thereof. The flow control valve 10 allows outflow of the fluid which enters from a flow-in pipe 15 in a lower side of the front end from a flow-out pipe 16, while adjusting the flow. In a piezoelectric actuator 20 of the flow control valve 10, a pair of piezoelectric plates 22 and 22 are arranged at positions crossing a front surface and the top surface of a support cylinder 21 formed into a cylindrical shape having an axis thereof in a direction vertical to the needle valve 14 moving direction, and alternating current voltage having a different phase are applied to these piezoelectric plates 22 and 22 so that the support cylinder 21 turns to turn the displacement transmission part 25 connected to the support cylinder 21. With this structure, the whole structure of the piezoelectric actuator 20 is simplified to miniaturize the whole of the flow control valve. COPYRIGHT: (C)2004,JPO
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