| 摘要 |
PROBLEM TO BE SOLVED: To provide a hot plate equipped with a conductive pattern with little bulge, with excellent adhesiveness and with large specific resistance. SOLUTION: The hot plate 3 uses a nitride ceramic board 9 equipped with conductive patterns 10, 10a. The conductive patterns 10, 10a consist of ruthenium oxide, bismuth or its oxide, glass frit and precious metal particles. COPYRIGHT: (C)2004,JPO
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