摘要 |
PROBLEM TO BE SOLVED: To realize a power-MOSFET using n-type drift layers and p-type drift layers and capable of reducing the ON-resistance. SOLUTION: A p-type base layer 5, a n-type source layer 6, a gate insulating film 7, and a gate electrode 8 constituting a MOSFET structure are formed in the region, where n-type drift layers 2, barrier insulating films 3, and p-type drift layers 4 are arranged alternately and repeatedly. COPYRIGHT: (C)2004,JPO
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