| 摘要 |
PROBLEM TO BE SOLVED: To provide an NF<SB>3</SB>gas purification method by which N<SB>2</SB>O can be removed selectively, efficiently and economically. SOLUTION: This method for purifying gaseous nitrogen trifluoride comprises removing dinitrogen oxide by bringing gaseous nitrogen trifluoride including dinitrogen oxide into contact with an aqueous sulfuric acid solution. COPYRIGHT: (C)2004,JPO
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