摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flexible tube having strength against mechanical impact from the outside and being hardly deformed and broken by an atmospheric pressure difference between the inside and the outside. <P>SOLUTION: This flexible tube 10 for a vacuum system is provided between a vacuum chamber 16 retaining the vacuum state and a vacuum pump 14 for evacuating the vacuum chamber 16. The flexible tube 10 is provided with a projection part 22a, a recess part 22b a tube body 22 formed of a hard material, and a cover 24 provided in the outer surface of the tube body 22 and formed of an elastic material 24. <P>COPYRIGHT: (C)2003,JPO</p> |