| 摘要 |
<P>PROBLEM TO BE SOLVED: To surely fetch an image of a single defect. <P>SOLUTION: An image signal from a receiver board 23 is processed by a data processing board 25, and image data on a defect is sent to a defect-image display device 15. The image signal from the receiver board 23 is digitized by an A/D converter 50. Digitized data is written in an SDRAM 51 for each scan by an FGPA-A 53, a FIFO-E 54 and a FIFO-O 55. A defect signal and defect position data are input to an FPGA-B 57. In a CPU 56, the continuity of the defect in each scan is decided on the basis of the defect signal. In the case of a continuous defect, the image is fetched in each predetermined prescribed number of scans. In the case of the single defect, a defect image is fetched every time. Since the number of times of a fetching operation by the continuous defect is limited, defect image data due to other single signals can be fetched, and a fetching oversight in a single defect image is reduced. <P>COPYRIGHT: (C)2003,JPO |
