WIRELESS TWEEZER FOR HANDLING SEMICONDUCTOR WAFER

摘要

PURPOSE: A wireless tweezer for handling a semiconductor wafer is provided to simplify the constitution of equipment of a semiconductor fabricating factory and extend a narrow work space by eliminating a vacuum apparatus installed in the bottom of the semiconductor fabricating factory. CONSTITUTION: A vacuum path(111) is formed in a connection part(110). An absorption plate(100) is attached to one end of the connection part. A handle(120) has an inner space connected to the vacuum path of the connection part, attached to the other end of the connection part. The handle is made of a flexible material, including an elastic spring(121) positioned in the inner space.