发明名称 |
Focused ion beam system and machining method using it |
摘要 |
A signal component for scanning a processing range and a signal component for synchronizing to movement of a moving stage are superimposed on an ion beam scanning signal. Using such a scanning signal, processing is carried out while moving a sample stage. In this way, it is possible to carry out processing using a focused ion beam device in a reduced amount of time for a plurality of samples.
|
申请公布号 |
US2003173527(A1) |
申请公布日期 |
2003.09.18 |
申请号 |
US20030297809 |
申请日期 |
2003.03.05 |
申请人 |
ADACHI TATSUYA;FUJII TOSHIAKI;SUGIYAMA YASUHIKO |
发明人 |
ADACHI TATSUYA;FUJII TOSHIAKI;SUGIYAMA YASUHIKO |
分类号 |
H01J37/20;H01J37/147;H01J37/30;H01J37/305;H01J37/317;H01L21/302;(IPC1-7):G21G5/00;A61N5/00;H01J37/302 |
主分类号 |
H01J37/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|