REMOVAL OF CARBON FROM SUBSTRATE SURFACES,申请号IL19970120522-传众专利搜索

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发明名称	REMOVAL OF CARBON FROM SUBSTRATE SURFACES
摘要
申请公布号	IL120522(A)	申请公布日期	2003.09.17
申请号	IL19970120522	申请日期	1997.03.25
申请人	PRAXAIR TECHNOLOGY, INC.	发明人
分类号	H01L21/302;H01L21/027;H01L21/304;H01L21/306;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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