| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe unit in which a stable electric characteristic test can be performed by suppressing the distortion of the center of a probe card. SOLUTION: The prove unit for probe-testing a semiconductor wafer by using the probe card comprises a probe card board, a probe needle 14 provided on the lower surface side of the board, a tester connecting terminal provided on the lower surface side of the board for electrically being connected to a test head 1 side, a connecting member 12 connected from the lower surface side of the board to the tester connecting terminal. The test head 1 electrically connected to the connecting member, and a wafer holding mechanism for holding the wafer W. COPYRIGHT: (C)2003,JPO
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