| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance-type accelerometer by which acceleration can be detected properly, even when an external force such as gravity or the like is always applied to a displacement direction of a plumb bob part in a usage state. SOLUTION: The capacitance-type accelerometer is provided with the plumb bob part 21, which is supported by a support substrate 11 and which can be displaced in a displacement direction Y according to an application of the applied acceleration; combtooth-shaped movable electrodes 24 formed at the plumb bob part 21; and combtooth-shaped fixed electrodes 32, 42 which are arranged so as to face the movable electrodes 24 and which form a capacitance across the movable electrodes 24. When the movable electrodes 24 are displaced, a direction in which the capacitance formed across the electrodes is changed is in the opposite directions in an inter-electrode interval d1 on one side of the plumb bob part 21 and an inter-electrode interval d2 on the other side, when an axis Y1 in the displacement direction of the plumb bob part 21 is used as the center. In the usage state with the external force being always applied, the inter-electrode electrodes d1, d2 are made nearly identical due to the displacement of the movable electrodes by the external force, and in a non-usage state with the external force not being applied, the inter-electrode intervals d1, d2 are made different. COPYRIGHT: (C)2003,JPO |
