| 摘要 |
PROBLEM TO BE SOLVED: To continuously remove a plurality of minute objects on an observed surface of a specimen. SOLUTION: An electron optical lens barrel 3 is mounted on an upper end part of a specimen chamber 2, and electron beam EB is irradiated on an observed surface S1 of a specimen S put on a driving stage 4. An extraction probe 11 and an exfoliation probe 10 are arranged in the upper part of the observed surface S1 of a specimen S. In the case that a plurality of minute objects are stuck on the observed surface S1, the plurality of minute objects are made to continuously stick to the extraction probe 11 and taken out by dint of a Coulomb attraction between the object and the extraction probe 11 to which, a positive electric potential is impressed, and a Coulomb repulsion between the object and the exfoliation probe 10 to which, a negative electric potential is impressed. The extraction probe 11 to which, the plurality of minute objects are stuck, is moved to another place in a state of being impressed with the positive electric potential, and the plurality of minute objects are dropped in a lump by switching to a negative electric potential after moving the extraction probe 11 to another place. COPYRIGHT: (C)2003,JPO
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