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发明名称
VERFAHREN UND GERÄT ZUR STEUERUNG DER REAKTIVEN IMPEDANZEN EINES, ZWISCHEN EINER RF QUELLE UND EINEM RF PLASMAREAKTOR GESCHALTETEN ANPASSUNGSSCHALTKREISES
摘要
申请公布号
DE69723649(D1)
申请公布日期
2003.08.28
申请号
DE19976023649
申请日期
1997.05.23
申请人
LAM RESEARCH CORP., FREMONT
发明人
RICHARDSON, BRETT;NGO, TUAN;BARNES, S.
分类号
H05H1/46;H01J37/32;H01L21/302;H01L21/3065;H03H7/40;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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