| 摘要 |
PROBLEM TO BE SOLVED: To correct measurement results of actual measurement, whose measurement results do not completely agree with those measured by a referential measuring instrument, so that they are equal to the measurement result of the measuring instrument. SOLUTION: Electrical characteristics of a specimen 11B for acquiring correction data are measured by the referential measuring instrument 1 and by a measuring instrument 2 for actual measurement, respectively, and then an expression of interrelation is found between measurement results by the instrument 2 and measurement results by the instrument 2. For calculation, electrical characteristics of an electric component 11A, or an object of measurement, measured by using the instrument 2 are applied to the expression. The electrical characteristics of the component 11A are corrected into electrical characteristics that are presumably obtained if measurement is made by the instrument 1. COPYRIGHT: (C)2003,JPO
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