Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe (12A) into electrical contact with an inspection electrode (P). An insulating film (O) formed on the surface of the inspection electrode (P) is broken by utilizing a fritting phenomenon so as to bring the inspection electrode (12A) into electrical contact with the inspection electrode (P). <IMAGE> <IMAGE>
申请公布号
EP1182460(A3)
申请公布日期
2003.08.20
申请号
EP20010119644
申请日期
2001.08.21
申请人
TOKYO ELECTRON LIMITED;SUGA, TADATOMO;ITOH, TOSHIHIRO