发明名称 Fritting inspection method and apparatus
摘要 Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe (12A) into electrical contact with an inspection electrode (P). An insulating film (O) formed on the surface of the inspection electrode (P) is broken by utilizing a fritting phenomenon so as to bring the inspection electrode (12A) into electrical contact with the inspection electrode (P). <IMAGE> <IMAGE>
申请公布号 EP1182460(A3) 申请公布日期 2003.08.20
申请号 EP20010119644 申请日期 2001.08.21
申请人 TOKYO ELECTRON LIMITED;SUGA, TADATOMO;ITOH, TOSHIHIRO 发明人 IINO, SHINJI;TAKEKOSHI, KIYOSHI;SUGA, TADATOMO;ITOH, TOSHIHIRO;KATAOKA, KENICHI
分类号 G01R31/26;G01N27/30;G01R1/06;G01R1/067;G01R31/28;H01L21/66 主分类号 G01R31/26
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