发明名称 |
Process for fabricating capacitor having dielectric layer with pervskite structure and apparatus for fabricating the same |
摘要 |
A barium strontium titanate is the ferroelectric substance with the perovskite structure available for a capacitor as a dielectric layer, and is crystallized through a high temperature heat treatment, in which the barium strontium titanate is further subjected to a low temperature heat treatment under the crystallizing temperature of the barium strontium titanate for eliminating impurities such as carbon and hydrogen therefrom so that the leakage current is drastically reduced.
|
申请公布号 |
US6602722(B2) |
申请公布日期 |
2003.08.05 |
申请号 |
US20020135620 |
申请日期 |
2002.04.30 |
申请人 |
NEC CORPORATION |
发明人 |
YAMAMOTO ICHIRO;IIZUKA TOSHIHIRO;KATO YOSHITAKE |
分类号 |
H01L27/108;C23C16/40;H01L21/02;H01L21/314;H01L21/316;H01L21/8242;(IPC1-7):H01G7/06 |
主分类号 |
H01L27/108 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|