| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for crystallizing a very small amount of solution disposed in the prescribed position on a substrate. SOLUTION: Liquid droplets of the solution in which a thin film forming material is dissolved are arranged on the substrate by ejecting the solution by an ink-jet method. Crystalline nuclei are produced in the solution by controlling a partial pressure of a gas having the same component as that of the solvent in the vicinity of the liquid droplets just after being arranged to a value equal to or almost equal to the saturated vapor pressure, for example. After the crystalline nuclei are produced, the partial pressure of the gas in the vicinity of the liquid droplets is lowered to 1/10 to 1/100 for the saturated vapor pressure, for example. COPYRIGHT: (C)2003,JPO
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