| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional position measuring device of a small and inexpensive construction in which a three-dimensional image entry processing technique is incorporated, capable of enhancing the positional accuracy which has been a problem according to any conventional arrangement. SOLUTION: An object measured 8 as an assist for measurement structured as fixed to the measuring system including a light source 4, image entry device 5, etc., is installed adjoining in the X-axis direction of an object to be measured 1 structured as movable freely in three directions along X-axis, Y-axis and Z-axis. COPYRIGHT: (C)2003,JPO
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