发明名称 APPARATUS AND METHOD FOR NANOSCALE AND MICROSCALE MECHANICAL MACHINING AND PROCESSING
摘要 <p>A microscale device provides for a nanoscale machining. A tool, similar to probes used in atomic force microscopy is attached to a micro-load gear and is powered by a micromotor. This very small tool allows a variety of nanostructures to be fabricated on a variety of substrates.</p>
申请公布号 WO2003057619(A2) 申请公布日期 2003.07.17
申请号 US2003000096 申请日期 2003.01.02
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