发明名称 |
COOLING TUBE AND LINEAR MOTOR |
摘要 |
PROBLEM TO BE SOLVED: To manufacture a lightweight cooling tube having high accuracy and restrain viscosity resistance. SOLUTION: This cooling tube includes a coil body 1 installed on one of two members relatively traveling and a magnetism emitting body 5 installed on the other member 2. This cooling tube is also fitted with a tube body 6, which surrounds the periphery of the coil body 1 and forms a flow passage 7 for temperature control medium 11 in a space between the coil body 1. The tube body 6 is formed out of fiber reinforced plastic. COPYRIGHT: (C)2003,JPO |
申请公布号 |
JP2003199318(A) |
申请公布日期 |
2003.07.11 |
申请号 |
JP20010396651 |
申请日期 |
2001.12.27 |
申请人 |
NIKON CORP;TORAY IND INC |
发明人 |
KAGEYAMA SHIGEKI;KAWASHIMA SHIGERU;NISHI YASUHIRO;YOSHIMURA HIROHIKO |
分类号 |
G03F7/20;F28F21/06;H01L21/027;H02K9/19;H02K41/02;H02K41/03;(IPC1-7):H02K41/02 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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