发明名称 COOLING TUBE AND LINEAR MOTOR
摘要 PROBLEM TO BE SOLVED: To manufacture a lightweight cooling tube having high accuracy and restrain viscosity resistance. SOLUTION: This cooling tube includes a coil body 1 installed on one of two members relatively traveling and a magnetism emitting body 5 installed on the other member 2. This cooling tube is also fitted with a tube body 6, which surrounds the periphery of the coil body 1 and forms a flow passage 7 for temperature control medium 11 in a space between the coil body 1. The tube body 6 is formed out of fiber reinforced plastic. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003199318(A) 申请公布日期 2003.07.11
申请号 JP20010396651 申请日期 2001.12.27
申请人 NIKON CORP;TORAY IND INC 发明人 KAGEYAMA SHIGEKI;KAWASHIMA SHIGERU;NISHI YASUHIRO;YOSHIMURA HIROHIKO
分类号 G03F7/20;F28F21/06;H01L21/027;H02K9/19;H02K41/02;H02K41/03;(IPC1-7):H02K41/02 主分类号 G03F7/20
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