发明名称 SPACER FOR PRESSURE WELDING STRUCTURE AND MANUFACTURING METHOD THEREFOR
摘要 <P>PROBLEM TO BE SOLVED: To reduce breakage of a spacer at screwing for pressure welding by using the spacer comprising a silicon nitride sintered compact of high heat dissipation characteristics and strength. <P>SOLUTION: Related to a spacer for pressure welding structure, a ceramics sintered compact contains silicon nitride as a main component. Its heat conductivity is 60 W/mK or more, destructive toughness value is 6.0 MPam<SP>1/2</SP>or more, and thickness is 0.7 mm or less. The ceramics sintered compact has a through hole. In a method for manufacturing the space for pressure welding structure, after the through hole is formed in a ceramics molded body, the space for pressure welding structure is degreased and sintered. The through hole is formed by performing laser processing for the ceramics molded body. <P>COPYRIGHT: (C)2003,JPO
申请公布号 JP2003197836(A) 申请公布日期 2003.07.11
申请号 JP20010396158 申请日期 2001.12.27
申请人 TOSHIBA CORP 发明人 YAMAGUCHI HARUHIKO;SHIRAI TAKAO;OKAMOTO MITSUHIRO
分类号 C04B35/584;H01L23/34;H01L23/36 主分类号 C04B35/584
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