| 摘要 |
PROBLEM TO BE SOLVED: To need no mechanical shutter when a liquid crystal display element is used instead of a mask to form an optional circuit pattern. SOLUTION: A liquid crystal display element 8 is used as a mask to form an exposing pattern for substrate formation, the exposing pattern is divided into a plurality of discontinuous patterns where the picture element opening of the liquid crystal display element 8 is formed as one dot, and then a wafer stage 10 is shifted at a specified pacing vertically and horizontally to expose the respective divided patterns repeatedly. When the patterns are joined and a continuous pattern image is formed on an exposed body applied with a resist, the exposed area of the liquid crystal display element 8 is shown in black during movement and alignment of the wafer stage 10. After the wafer stage 10 arrives at a target position, a specified pattern is indicated in the exposed area of the liquid crystal display element 8 and it is exposed. COPYRIGHT: (C)2003,JPO |
