摘要 |
A directed vapor deposition (DVD) method and system for applying at least one bond coating on at least one substrate for thermal barrier coating systems. To overcome the limitations incurred by conventional methods, the DVD system uses an electron beam (2) and a combined inert gas / reactive gas jet (CL) of controlled composition to create engineering films. In this system, the vaporized material can. be entrained in the carrier gas jet (5) and deposited onto the substrate (20) at a high rate and with high materials utilization efficiency. The velocity and flux of the gas atoms entering the chamber, the nozzle parameters, and the operating chamber pressure can all be significantly varied, facilitating wide processing condition variation and allowing for improved control over the properties of the deposited layer. |
申请人 |
UNIVERSITY OF VIRGINIA PATENT FOUNDATION;HASS, DEREK, D.;WADLEY, HAYDN, N.G.;DHARMASENA, KUMAR, P.;MARCIANO, YOSEF |
发明人 |
HASS, DEREK, D.;WADLEY, HAYDN, N.G.;DHARMASENA, KUMAR, P.;MARCIANO, YOSEF |