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发明名称
DISSOLUTION INHIBITORS IN PHOTORESIST COMPOSITIONS FOR MICROLITHOGRAPHY
摘要
申请公布号
EP1325387(A2)
申请公布日期
2003.07.09
申请号
EP20010983184
申请日期
2001.10.12
申请人
E.I. DUPONT DE NEMOURS AND COMPANY
发明人
BERGER, LARRY, L;FELDMAN, JERALD;PETROV, VIACHESLAV, ALEXANDROVICH;SCHADT, FRANK, L., III;FEIRING, ANDREW, F.;ZUMSTEG, FREDRICK, CLAUS, JR.
分类号
G03F7/039;G03F7/004;G03F7/038;G03F7/20;G03F7/30;H01L21/027;(IPC1-7):G03F7/039
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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