| 摘要 |
PURPOSE: An apparatus for removing an edge is provided to automatically and accurately tune the size of an edge remover by attaching a photo sensor, and complement mechanical distortion of a scan arm by moving a ball screw. CONSTITUTION: A support plate is provided for loading a substrate(110) where a photoresist(111) is applied. A scan arm(112) scans an edge of the substrate for removing the photoresist of the edge. A photo sensor(118) is attached to an end of the scan arm for recognizing a position of the edge of the substrate. An LM(Linear Motor) guide moves the scan arm following the edge of the substrate. A cable chain is connected with the scan arm for supplying power for the scanning. A driving motor moves the scan arm in and out of the edge.
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