发明名称 |
Method of measuring the probability of failure caused only by defects, method of measuring defect limited yield, and system using the same |
摘要 |
A method of calculating a probability of failures caused only by defects, a method of calculating a defect limited yield using the classification of pattern parameters extracted only from the defects, and a system for calculating the probability of failure and the defect limited yield are provided. In one exemplary embodiment for calculating a probability of failures caused only by defects, defects are detected in inspected blocks that have defects and in blocks located around the inspected blocks to measure the number of inspected blocks that have failures caused by reasons other than the defects in the blocks located around the inspected blocks having defects (n1), the number of inspected blocks having no failures in the blocks located around the inspected blocks having the defects (n2), the number of inspected blocks having failures caused by defects in the inspected blocks having defects (n3), and the number of inspected blocks having no failures in the inspected blocks having defects (n4). The data (n1) through (n4) is then substituted in the following formula: <math-cwu id="MATH-US-00001"> <number>1</number> <math> <mrow> <mrow> <mi>KR</mi> <mo>=</mo> <mrow> <mn>1</mn> <mo>-</mo> <mfrac> <mrow> <mn>1</mn> <mo>-</mo> <msub> <mi>KR</mi> <mn>1</mn> </msub> </mrow> <mrow> <mn>1</mn> <mo>-</mo> <msub> <mi>KR</mi> <mn>0</mn> </msub> </mrow> </mfrac> </mrow> </mrow> <mo>,</mo> </mrow> </math> <mathematica-file id="MATHEMATICA-00001" file="US20030120459A1-20030626-M00001.NB"/> <image id="EMI-M00001" wi="216.027" he="18.00225" file="US20030120459A1-20030626-M00001.TIF" imf="TIFF" ti="MF"/> </math-cwu> where <math-cwu id="MATH-US-00002"> <number>2</number> <math> <mrow> <mrow> <mi>where</mi> <mo>it</mo> <mstyle> <mtext> </mtext> </mstyle> <mo>it</mo> <msub> <mi>KR</mi> <mn>0</mn> </msub> </mrow> <mo>=</mo> <mfrac> <mi>n1</mi> <mrow> <mi>n1</mi> <mo>+</mo> <mi>n2</mi> </mrow> </mfrac> </mrow> </math> <mathematica-file id="MATHEMATICA-00002" file="US20030120459A1-20030626-M00002.NB"/> <image id="EMI-M00002" wi="216.027" he="17.03835" file="US20030120459A1-20030626-M00002.TIF" imf="TIFF" ti="MF"/> </math-cwu> and <math-cwu id="MATH-US-00003"> <number>3</number> <math> <mrow> <mrow> <mi>and</mi> <mo>it</mo> <mstyle> <mtext> </mtext> </mstyle> <mo>it</mo> <msub> <mi>KR</mi> <mn>1</mn> </msub> </mrow> <mo>=</mo> <mrow> <mfrac> <mi>n3</mi> <mrow> <mi>n3</mi> <mo>+</mo> <mi>n4</mi> </mrow> </mfrac> <mo>.</mo> </mrow> </mrow> </math> <mathematica-file id="MATHEMATICA-00003" file="US20030120459A1-20030626-M00003.NB"/> <image id="EMI-M00003" wi="216.027" he="17.03835" file="US20030120459A1-20030626-M00003.TIF" imf="TIFF" ti="MF"/> </math-cwu>
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申请公布号 |
US2003120459(A1) |
申请公布日期 |
2003.06.26 |
申请号 |
US20020288424 |
申请日期 |
2002.11.06 |
申请人 |
LEE DAE-SUNG;LEE JAE-CHEOL;SON GOOK-TAE;KIM JUNG-HEE |
发明人 |
LEE DAE-SUNG;LEE JAE-CHEOL;SON GOOK-TAE;KIM JUNG-HEE |
分类号 |
H01L21/66;(IPC1-7):G06F15/00 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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