Carbon nanotube synthesis comprises catalytically depositing carbon in the gas phase on a catalytic layer formed on a support element using an ion beam to modify physical, chemical and/or conducting properties

摘要

Process for synthesizing carbon nanotubes comprises catalytically depositing carbon in the gas phase on a catalytic layer formed on a support element. An ion beam is used to modify the physical, chemical and/or conducting properties of the nanotubes before, during and/or after formation of the nanotubes. Preferred Features: The catalytic layer is 10-500, preferably 30-60 nm thick. The ion beam is guided using a deviating element and/or a focussing element and is controlled using a stencil mask. The ion beam contains particles made from Co, Ni, Fe, He, H, Ar, Xe, Kr, O, or a dopant made from As, P, B, Ag, Au, Pt, Pd and their mixtures. The catalytic layer is a metal layer.