发明名称 Test plate apparatus for testing semiconductor element, includes several zones such that semiconductor elements to be tested are arranged at specific zone based on characteristics of semiconductor elements to be tested
摘要 The test plate (1) is divided into several zones and semiconductor elements to be tested are arranged at a corresponding zone based on the characteristics of the semiconductor elements to be tested.
申请公布号 DE10158126(A1) 申请公布日期 2003.06.26
申请号 DE20011058126 申请日期 2001.11.28
申请人 CHEN, ANDY 发明人 CHEN, ANDY
分类号 G01R31/28;(IPC1-7):G01R31/28;G01R31/26;H01L21/66 主分类号 G01R31/28
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