发明名称 |
Test plate apparatus for testing semiconductor element, includes several zones such that semiconductor elements to be tested are arranged at specific zone based on characteristics of semiconductor elements to be tested |
摘要 |
The test plate (1) is divided into several zones and semiconductor elements to be tested are arranged at a corresponding zone based on the characteristics of the semiconductor elements to be tested.
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申请公布号 |
DE10158126(A1) |
申请公布日期 |
2003.06.26 |
申请号 |
DE20011058126 |
申请日期 |
2001.11.28 |
申请人 |
CHEN, ANDY |
发明人 |
CHEN, ANDY |
分类号 |
G01R31/28;(IPC1-7):G01R31/28;G01R31/26;H01L21/66 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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